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Fast Synthesis of High-Performance Graphene Films by Hydrogen-Free Rapid Thermal Chemical Vapor Deposition

Cited 140 time in Web of Science Cited 146 time in Scopus
Authors
Ryu, Jaechul; Kim, Youngsoo; Won, Dongkwan; Kim, Nayoung; Park, Jin Sung; Lee, Eun-Kyu; Cho, Donyub; Cho, Sung-Pyo; Kim, Sang Jin; Ryu, Gyeong Hee; Shin, Hae-A-Seul; Lee, Zonghoon; Hong, Byung Hee; Cho, Seungmin
Issue Date
2014-01
Citation
ACS Nano, Vol.8 No.1, pp.950-956
Keywords
graphenetransparentflexiblefoldabletouch screenchemical vapor deposition
Abstract
The practical use of graphene in consumer electronics has not been demonstrated since the size, uniformity, and reliability problems are yet to be solved to satisfy industrial standards. Here we report mass-produced graphene films synthesized by hydrogen-free rapid thermal chemical vapor deposition (RT-CVD), roll-to-roll etching, and transfer methods, which enabled faster and larger production of homogeneous graphene films over 400 x 300 mm(2) area with a sheet resistance of 249 +/- 17 Omega/sq without additional doping. The properties of RT-CVD graphene have been carefully characterized by high-resolution transmission electron microscopy, Raman spectroscopy, chemical grain boundary analysis, and various electrical device measurements, showing excellent uniformity and stability. In particular, we found no significant correlation between graphene domain sizes and electrical conductivity, unlike previous theoretical expectations for nanoscale graphene domains. Finally, the actual application of the RT-CVD films to capacitive multitouch devices installed in the most sophisticated mobile phone was demonstrated.
ISSN
1936-0851
URI
https://hdl.handle.net/10371/172138
DOI
https://doi.org/10.1021/nn405754d
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College of Natural Sciences (자연과학대학)Dept. of Chemistry (화학부)Journal Papers (저널논문_화학부)
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