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Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Junbeom | - |
dc.contributor.author | Ghosh, Ramesh | - |
dc.contributor.author | Song, Minho S. | - |
dc.contributor.author | Hwang, Yunjae | - |
dc.contributor.author | Tchoe, Youngbin | - |
dc.contributor.author | Saroj, Rajendra Kumar | - |
dc.contributor.author | Ali, Asad | - |
dc.contributor.author | Guha, Puspendu | - |
dc.contributor.author | Kim, Bosung | - |
dc.contributor.author | Kim, Sang-Woo | - |
dc.contributor.author | Kim, Miyoung | - |
dc.contributor.author | Yi, Gyu-Chul | - |
dc.date.accessioned | 2022-06-21T08:01:52Z | - |
dc.date.available | 2022-06-21T08:01:52Z | - |
dc.date.created | 2022-05-31 | - |
dc.date.issued | 2022-12 | - |
dc.identifier.citation | NPG Asia Materials, Vol.14 No.1, p. 40 | - |
dc.identifier.issn | 1884-4049 | - |
dc.identifier.uri | https://hdl.handle.net/10371/182633 | - |
dc.description.abstract | We report the fabrication of individually addressable, high-density, vertical zinc oxide (ZnO) nanotube pressure sensor arrays. High-sensitivity and flexible piezoelectric sensors were fabricated using dimension- and position-controlled, vertical, and free-standing ZnO nanotubes on a graphene substrate. Significant pressure/force responses were achieved from small devices composed of only single, 3 x 3, 5 x 5, and 250 x 250 ZnO nanotube arrays on graphene. An individually addressable pixel matrix was fabricated by arranging the top and bottom electrodes of the sensors in a crossbar configuration. We investigated the uniformity and robustness of pressure/force spatial mapping by considering the pixel size, the number of ZnO nanotubes in each pixel, and the lateral dimensions of individual ZnO nanotubes. A spatial resolution as high as 1058 dpi was achieved for a Schottky diode-based force/pressure sensor composed of ZnO nanotubes on a flexible substrate. Additionally, we confirmed the excellent flexibility and electrical robustness of the free-standing sensor arrays for high-resolution tactile imaging. We believe that this work opens important opportunities for 1D piezoelectric pressure/force sensor arrays with enormous applications in human-electronics interfaces, smart skin, and micro- and nanoelectromechanical systems. | - |
dc.language | 영어 | - |
dc.publisher | Nature Publishing Group | - |
dc.title | Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene | - |
dc.type | Article | - |
dc.identifier.doi | 10.1038/s41427-022-00386-4 | - |
dc.citation.journaltitle | NPG Asia Materials | - |
dc.identifier.wosid | 000794880200003 | - |
dc.identifier.scopusid | 2-s2.0-85129919776 | - |
dc.citation.number | 1 | - |
dc.citation.startpage | 40 | - |
dc.citation.volume | 14 | - |
dc.description.isOpenAccess | N | - |
dc.contributor.affiliatedAuthor | Kim, Miyoung | - |
dc.contributor.affiliatedAuthor | Yi, Gyu-Chul | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
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