Publications

Detailed Information

Operando Study of Thermal Oxidation of Monolayer MoS2

Cited 37 time in Web of Science Cited 38 time in Scopus
Authors

Park, Sangwook; Garcia-Esparza, Angel T.; Abroshan, Hadi; Abraham, Baxter; Vinson, John; Gallo, Alessandro; Nordlund, Dennis; Park, Joonsuk; Kim, Taeho Roy; Vallez, Lauren; Alonso-Mori, Roberto; Sokaras, Dimosthenis; Zheng, Xiaolin

Issue Date
2021-05
Publisher
Wiley-VCH Verlag
Citation
Advanced Science, Vol.8 No.9, p. 2002768
Abstract
Monolayer MoS2 is a promising semiconductor to overcome the physical dimension limits of microelectronic devices. Understanding the thermochemical stability of MoS2 is essential since these devices generate heat and are susceptible to oxidative environments. Herein, the promoting effect of molybdenum oxides (MoOx) particles on the thermal oxidation of MoS2 monolayers is shown by employing operando X-ray absorption spectroscopy, ex situ scanning electron microscopy and X-ray photoelectron spectroscopy. The study demonstrates that chemical vapor deposition-grown MoS2 monolayers contain intrinsic MoOx and are quickly oxidized at 100 degrees C (3 vol% O-2/He), in contrast to previously reported oxidation thresholds (e.g., 250 degrees C, t <= 1 h in the air). Otherwise, removing MoOx increases the thermal oxidation onset temperature of monolayer MoS2 to 300 degrees C. These results indicate that MoOx promote oxidation. An oxide-free lattice is critical to the long-term stability of monolayer MoS2 in state-of-the-art 2D electronic, optical, and catalytic applications.
ISSN
2198-3844
URI
https://hdl.handle.net/10371/202168
DOI
https://doi.org/10.1002/advs.202002768
Files in This Item:
There are no files associated with this item.
Appears in Collections:

Related Researcher

  • College of Engineering
  • Department of Mechanical Engineering
Research Area Clean Hydrogen Production and Storage, Greenhouse Gas Reduction and Carbon Utilization, Water & Air Purification, 오염수 및 대기 정화 기술, 온실 기체 절감 및 탄소 자원화, 친환경 수소 생산 및 저장

Altmetrics

Item View & Download Count

  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.

Share