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Chemical vapour deposition

Cited 225 time in Web of Science Cited 224 time in Scopus
Authors

Sun, Luzhao; Yuan, Guowen; Gao, Libo; Yang, Ji Eun; Chhowalla, Manish; Gharahcheshmeh, Meysam Heydari; Gleason, Karen K.; Choi, Yong Seok; Hong, Byung Hee; Liu, Zhongfan

Issue Date
2021-01
Publisher
SPRINGERNATURE
Citation
Nature Reviews Methods Primers, Vol.1 No.1, p. 5
Abstract
Chemical vapour deposition (CVD) is a powerful technology for producing high-quality solid thin films and coatings. Although widely used in modern industries, it is continuously being developed as it is adapted to new materials. Today, CVD synthesis is being pushed to new heights with the precise manufacturing of both inorganic thin films of 2D materials and high-purity polymeric thin films that can be conformally deposited on various substrates. In this Primer, an overview of the CVD technique, including instrument construction, process control, material characterization and reproducibility issues, is provided. By taking graphene, 2D transition metal dichalcogenides (TMDs) and polymeric thin films as typical examples, the best practices for experimentation involving substrate pretreatment, high-temperature growth and post-growth processes are presented. Recent advances and scaling-up challenges are also highlighted. By analysing current limitations and optimizations, we also provide insight into possible future directions for the method, including reactor design for high-throughput and low-temperature growth of thin films. This Primer on chemical vapour deposition summarizes current and emerging experimental set-ups as well as common characterization approaches used to determine thin film formation and quality as applied to graphene and other novel 2D materials.
ISSN
2662-8449
URI
https://hdl.handle.net/10371/204550
DOI
https://doi.org/10.1038/s43586-020-00005-y
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  • College of Natural Sciences
  • Department of Chemistry
Research Area Nanofabrication and characterization, Nanomaterials Synthesis, Quantum mechanics and molecular dynamics simulation, 나노재료 합성, 나노제조 및 특성화, 양자역학 및 분자역학 시뮬레이션

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