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High throughput laser assisted near-field nanomanufacturing
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Pan, Heng | - |
dc.contributor.author | Hwang, David | - |
dc.contributor.author | Ko, Seung H. | - |
dc.contributor.author | Grigoropoulos, Costas P. | - |
dc.date.accessioned | 2024-08-08T01:48:24Z | - |
dc.date.available | 2024-08-08T01:48:24Z | - |
dc.date.created | 2024-06-25 | - |
dc.date.created | 2024-06-25 | - |
dc.date.issued | 2009 | - |
dc.identifier.citation | ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings, Vol.102, pp.1315-1318 | - |
dc.identifier.uri | https://hdl.handle.net/10371/208303 | - |
dc.description.abstract | Near field nanomanufacturing can break the diffraction limitation and generate features at nanoscale. However, current near field nanomanufacturing suffers from the low throughput and hinders its practical applications. In this paper, we are presenting a new approach of adopting a near-field lens array and generate an array of features with nanoscale resolution. | - |
dc.language | 영어 | - |
dc.publisher | Laser Institute of America | - |
dc.title | High throughput laser assisted near-field nanomanufacturing | - |
dc.type | Article | - |
dc.identifier.doi | 10.2351/1.5061492 | - |
dc.citation.journaltitle | ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings | - |
dc.identifier.scopusid | 2-s2.0-77953881563 | - |
dc.citation.endpage | 1318 | - |
dc.citation.startpage | 1315 | - |
dc.citation.volume | 102 | - |
dc.description.isOpenAccess | N | - |
dc.contributor.affiliatedAuthor | Ko, Seung H. | - |
dc.type.docType | Conference Paper | - |
dc.description.journalClass | 1 | - |
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