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Issue Date	Title / Author(s) / Citation	File	Altmetrics
2008-08	The characteristics of organic-inorganic hybrid low-k thin films by PECVD Cho, Sang Jin; Bae, In Seob; Park, Yong Seob; Hong, Byung Hee; Park, Woo Jung; Park, S. C.; Boo, Jin Hyo Surface and Coatings Technology, Vol.202 No.22-23, pp.5654-5658	DOI