S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Materials Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
반응성 스퍼터링법을 이용한 (Ti,Al)N 확산방지막의 증착 및 특성분석
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- 서울대학교 대학원
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2001.
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