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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Materials Science and Engineering (재료공학부)
Theses (Master's Degree_재료공학부)
반응성 스퍼터링법을 이용한 (Ti,Al)N 확산방지막의 증착 및 특성분석
- Authors
- Advisor
- 황철성
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000064782
https://hdl.handle.net/10371/30475
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