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Two-zone 확산법을 이용한 실리콘 박막으로의 Phosphorus 도핑에 관한 연구(A study on the phosphorus doping in silicon thin film using two-zone diffusion method)
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- Authors
- Advisor
- 김형준
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :무기재료공학과,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068539
https://hdl.handle.net/10371/30507
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