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아르곤질소 혼합기체를 이용하여 스퍼터링 증착한 Cu 박막에서의 미세구조의 조절
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- Authors
- Advisor
- 윤의준
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :무기재료공학과,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068474
https://hdl.handle.net/10371/30521
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