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저온 N₂O 플라즈마 처리에 의한 TFT 게이트용 고유전율 Ta₂O[5] 박막의 증착 및 특성 분석

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Authors

엄명윤

Advisor
김형준
Issue Date
1999
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :무기재료공학과,1999.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072314

https://hdl.handle.net/10371/30545
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