Publications
Detailed Information
저온 N₂O 플라즈마 처리에 의한 TFT 게이트용 고유전율 Ta₂O[5] 박막의 증착 및 특성 분석
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김형준
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :무기재료공학과,1999.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072314
https://hdl.handle.net/10371/30545
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.