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Dielectric properties of ZrTiO₄thin films deposited by DC mangetron reactive sputtering : DC magnetron reactive sputtering 으로 증착한 ZrTiO₄박막의 유전특성 고찰
DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 박병우 | - |
dc.contributor.author | 김태석 | - |
dc.date.accessioned | 2010-01-15T02:44:35Z | - |
dc.date.available | 2010-01-15T02:44:35Z | - |
dc.date.copyright | 2000. | - |
dc.date.issued | 2000 | - |
dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000070087 | eng |
dc.identifier.uri | https://hdl.handle.net/10371/30635 | - |
dc.description | Thesis (master`s)--서울대학교 대학원 :금속공학과,2000. | en |
dc.format.extent | v, 35 p. | en |
dc.language.iso | en | en |
dc.publisher | 서울대학교 대학원 | en |
dc.title | Dielectric properties of ZrTiO₄thin films deposited by DC mangetron reactive sputtering | en |
dc.title.alternative | DC magnetron reactive sputtering 으로 증착한 ZrTiO₄박막의 유전특성 고찰 | - |
dc.type | Thesis | - |
dc.contributor.department | 금속공학과 | - |
dc.description.degree | Master | en |
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