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Dielectric properties of ZrTiO₄thin films deposited by DC mangetron reactive sputtering : DC magnetron reactive sputtering 으로 증착한 ZrTiO₄박막의 유전특성 고찰

DC Field Value Language
dc.contributor.advisor박병우-
dc.contributor.author김태석-
dc.date.accessioned2010-01-15T02:44:35Z-
dc.date.available2010-01-15T02:44:35Z-
dc.date.copyright2000.-
dc.date.issued2000-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000070087eng
dc.identifier.urihttps://hdl.handle.net/10371/30635-
dc.descriptionThesis (master`s)--서울대학교 대학원 :금속공학과,2000.en
dc.format.extentv, 35 p.en
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.titleDielectric properties of ZrTiO₄thin films deposited by DC mangetron reactive sputteringen
dc.title.alternativeDC magnetron reactive sputtering 으로 증착한 ZrTiO₄박막의 유전특성 고찰-
dc.typeThesis-
dc.contributor.department금속공학과-
dc.description.degreeMasteren
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