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유도결합 플라즈마 스퍼터링에 의한 TiN 박막의 제조 및 특성
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- Authors
- Advisor
- 이정중
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :금속공학과,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068352
https://hdl.handle.net/10371/30655
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