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플라즈마 화학 증착된 TiN의 유량비에 따른 특성 변화

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Authors

나재웅

Advisor
이정중
Issue Date
1999
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :금속공학과,1999.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000073815

https://hdl.handle.net/10371/30670
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