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A Micromachined and non-vacuum packaged silicon vibratory gyroscope : 미세 가공 기술로 제작된 비진공 실장형 실리콘 진동 각속도계
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김용권 | - |
| dc.contributor.author | 김성혁 | - |
| dc.date.accessioned | 2010-01-15T04:14:40Z | - |
| dc.date.available | 2010-01-15T04:14:40Z | - |
| dc.date.copyright | 2002. | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061109 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/30711 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2002. | en |
| dc.format.extent | xiii,147 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 미세 가공 기술 | en |
| dc.subject | micromachining | en |
| dc.subject | 비진공 실장형 | en |
| dc.subject | non-vacuum packaged gyroscope | en |
| dc.subject | 실리콘 진동 각속도계 | en |
| dc.subject | small damping | en |
| dc.subject | 낮은 공기 감쇠 | en |
| dc.subject | silicon snd glass bonded wafer | en |
| dc.subject | 단결정 실리콘 | en |
| dc.subject | silicon deep RIE | en |
| dc.title | A Micromachined and non-vacuum packaged silicon vibratory gyroscope | en |
| dc.title.alternative | 미세 가공 기술로 제작된 비진공 실장형 실리콘 진동 각속도계 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | en |
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