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레이저 유기 형광법을 이용한 플라즈마 내의 밀도 및 전계 측정에 관한 연구
A Study on the measurement of the radical density and the electric field in plasma using the laser-induced fluorescence

DC Field Value Language
dc.contributor.advisor황기웅-
dc.contributor.author김정훈-
dc.date.accessioned2010-01-15T04:16:23Z-
dc.date.available2010-01-15T04:16:23Z-
dc.date.copyright2001.-
dc.date.issued2001-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063490kor
dc.identifier.urihttps://hdl.handle.net/10371/30752-
dc.description학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2001.ko
dc.format.extentxiii, 138 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectlaser induced fluorescence spectroscopyko
dc.subject레이저 유기 형광법ko
dc.subjecthigh selective SiO₂ etchingko
dc.subject고선택비 산화막 식각ko
dc.subjecthelicon plasmako
dc.subject헬리콘 플라즈마ko
dc.subjectAC plasma display panelko
dc.subject교류형 플라즈마 표시기ko
dc.subjectwall voltageko
dc.subject벽전압ko
dc.title레이저 유기 형광법을 이용한 플라즈마 내의 밀도 및 전계 측정에 관한 연구ko
dc.title.alternativeA Study on the measurement of the radical density and the electric field in plasma using the laser-induced fluorescenceko
dc.typeThesis-
dc.contributor.department전기·컴퓨터공학부-
dc.description.degreeDoctorko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Ph.D. / Sc.D._전기·정보공학부)
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