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College of Engineering/Engineering Practice School (공과대학/대학원)
Dept. of Electrical and Computer Engineering (전기·정보공학부)
Theses (Ph.D. / Sc.D._전기·정보공학부)
A study on advanced RPECVD technology and its application to reliable GaAs power PHEMTs and MMICs
신뢰성 있는 GaAs 전력용 PHEMTs 와 MMICs를 위한 개선된 RPECVD 기술 및 그 응용에 관한 연구
- Authors
- 이재학
- Advisor
- 서광석
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Keywords
- PHEMTs; 표준 SNU-ISRC MMIC 제작공정; MIM; 신뢰성; Si-ICL; 항복전압의 변화; RPECVD; 초박막 메탈-메탈 캐패시터; reliability; 드레인 전류 주파수의존성
- Description
- Thesis (doctoral)--서울대학교 대학원 :전기.컴퓨터공학부,2001.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063580
https://hdl.handle.net/10371/30788
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