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Modeling and simulation of charging effects in electron beam lithography : 전자빔 리소그래피에서의 전하축적효과 모델링과 시뮬레이션
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- Authors
- Advisor
- 전국진
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Keywords
- SCALPEL ; 전자빔리소그래피 ; beam deflection ; 전하축적효과 ; pattern distortion ; 몬테카를로 시뮬레이션 ; numerical method ; 수치해석 ; EBIC ; 빔 굴절
- Description
- Thesis (doctoral)--서울대학교 대학원 :전기.컴퓨터공학부,2001.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063421
https://hdl.handle.net/10371/30797
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