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A study on the screening of trapped electrons in thin SiO₂layer : 얇은 산화 실리콘박막에 포획된 전자들의 차폐효과에 대한 연구
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- Authors
- Advisor
- 박영준
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Keywords
- 차폐효과 ; Screening ; 도핑 분포 ; scanning capacitance microscopy (SCM) ; 주사형·정전 현미경 ; C-V ; 포획전자 ; dopant profile ; 이동성 전하 ; electron and hole trap
- Description
- Thesis (doctoral)--서울대학교 대학원 :전자공학과,1999.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000071865
https://hdl.handle.net/10371/30808
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