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Study on process dependence of contact resistance : 공정 조건에 따른 콘택 저항에 관한 연구
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- Authors
- Advisor
- 이종덕
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Keywords
- 콘택 저항 ; Contact Resistance ; 식각 선택비 ; Etch Selectivity ; 복합 이온주입 ; Mixed Ion Implantation ; 콘택 플러그 이온주입 ; Contact Plug Ion Implantation ; 기판 손실량 ; Substrate Loss
- Description
- Thesis (doctoral)--서울대학교 대학원 :전기공학부,2000.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000069730
https://hdl.handle.net/10371/30903
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