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SBM 공정 기술의 개발과 초소형 각속도계에의 응용 : Development of the SBM(surfacebulk micromachining) technology and its application to the fabrication of micro-gyroscope
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 조동일 | - |
| dc.contributor.author | 이상우 | - |
| dc.date.accessioned | 2010-01-15T04:22:41Z | - |
| dc.date.available | 2010-01-15T04:22:41Z | - |
| dc.date.copyright | 2000. | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000069165 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/30909 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :전기공학부,2000. | ko |
| dc.format.extent | x, 122 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 표면/몸체미세가공 | ko |
| dc.subject | surface/bulk micromachining process | ko |
| dc.subject | (111) 실리콘 웨이퍼 | ko |
| dc.subject | (111) silicon wafer | ko |
| dc.subject | 단결정 실리콘 구조물 | ko |
| dc.subject | single crystal silicon structure | ko |
| dc.subject | 정션 절연 방법 | ko |
| dc.subject | p-n junction isolation method | ko |
| dc.subject | 산화막/다결정실리콘/금속 절연 방법 | ko |
| dc.subject | oxide/polysilicon/metal isolation method | ko |
| dc.title | SBM 공정 기술의 개발과 초소형 각속도계에의 응용 | ko |
| dc.title.alternative | Development of the SBM(surfacebulk micromachining) technology and its application to the fabrication of micro-gyroscope | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기공학부 | - |
| dc.description.degree | Doctor | ko |
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