Browse

(111) 실리콘의 습식식각 특성과 그 응용

DC Field Value Language
dc.contributor.advisor조동일-
dc.contributor.author백승준-
dc.date.accessioned2010-01-15T04:36:56Z-
dc.date.available2010-01-15T04:36:56Z-
dc.date.copyright2001.-
dc.date.issued2001-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000065161kor
dc.identifier.urihttps://hdl.handle.net/10371/31140-
dc.description학위논문(석사)--서울대학교 대학원 :전기.컴퓨터공학부,2001.ko
dc.format.extentv, 53 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject(111) 실리콘ko
dc.subject(111) siliconko
dc.subject{431} 면ko
dc.subject{431} planeko
dc.subject미세 전기기계 시스템ko
dc.subjectmicroelectromechanical systems(MEMS)ko
dc.subject비등방성 식각ko
dc.subjectanisotropic etchko
dc.subject웨곤 휠ko
dc.subjectwagon wheelko
dc.subjectAFMko
dc.subjectTMAH(tetramethyl ammonium hydroxide)ko
dc.subjectSPMko
dc.subjectTMAHko
dc.title(111) 실리콘의 습식식각 특성과 그 응용ko
dc.typeThesis-
dc.contributor.department전기.컴퓨터공학부-
dc.description.degreeMasterko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
Files in This Item:
There are no files associated with this item.
  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.

Browse