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(Ba,Sr)TiO₃박막의 전기적 특성 향상을 위한 2-단계 증착 공정
A Two-step properties of (Ba,Sr)TiO₃thin films

DC Field Value Language
dc.contributor.advisor주승기-
dc.contributor.author길덕신-
dc.date.accessioned2010-01-16T13:54:49Z-
dc.date.available2010-01-16T13:54:49Z-
dc.date.copyright1999.-
dc.date.issued1999-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000071446kor
dc.identifier.urihttp://hdl.handle.net/10371/34593-
dc.description학위논문(박사)--서울대학교 대학원 :금속공학과,1999.ko
dc.format.extentxii, 121 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subjectDRAMko
dc.subjectDielectric filmko
dc.subject유전박막ko
dc.subjectSputteringko
dc.subject스퍼터링ko
dc.subject2-step processko
dc.subject2단계 증착법ko
dc.subjectSeed layerko
dc.subject씨앗층ko
dc.title(Ba,Sr)TiO₃박막의 전기적 특성 향상을 위한 2-단계 증착 공정ko
dc.title.alternativeA Two-step properties of (Ba,Sr)TiO₃thin filmsko
dc.typeThesis-
dc.contributor.department금속공학과-
dc.description.degreeDoctorko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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