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Ru과 RuO₂의 화학기상증착기구와 물성개선에 대한 연구 : A Study on the chemical vapor deposition of Ru and RuO₂thin film with ruthenocene precursor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김기범 | - |
| dc.contributor.author | 박성언 | - |
| dc.date.accessioned | 2010-01-16T13:54:52Z | - |
| dc.date.available | 2010-01-16T13:54:52Z | - |
| dc.date.copyright | 1999. | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000071444 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/34594 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :금속공학과,1999. | ko |
| dc.format.extent | xiv, 188 p. | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | RuO₂ | ko |
| dc.subject | chemical vapor deposition | ko |
| dc.subject | Ru | ko |
| dc.subject | Ru incorporation rate | ko |
| dc.subject | ruthenocene precursor | ko |
| dc.subject | 화학기상증착 | ko |
| dc.subject | Ru 혼입속도 | ko |
| dc.title | Ru과 RuO₂의 화학기상증착기구와 물성개선에 대한 연구 | ko |
| dc.title.alternative | A Study on the chemical vapor deposition of Ru and RuO₂thin film with ruthenocene precursor | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | ko |
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