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몸체 미세 가공 기술을 이용한 비틀림형 실리콘 가속도계의 제작

DC Field Value Language
dc.contributor.advisor전국진-
dc.contributor.author석선호-
dc.date.accessioned2010-01-18T05:42:22Z-
dc.date.available2010-01-18T05:42:22Z-
dc.date.copyright1999.-
dc.date.issued1999-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072450kor
dc.identifier.urihttp://hdl.handle.net/10371/36652-
dc.description학위논문(석사)--서울대학교 대학원 :전기공학부,1999.ko
dc.format.extent36 장ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.title몸체 미세 가공 기술을 이용한 비틀림형 실리콘 가속도계의 제작ko
dc.typeThesis-
dc.contributor.department전기공학부-
dc.description.degreeMasterko
Appears in Collections:
College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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