Publications
Detailed Information
광기록 장치의 픽업헤드용 실리콘 스캐닝 미러의 제작과 구동실험
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김용권
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Keywords
- 마이크로머시닝 기술 ; micromachining technology ; 픽업헤드용 스캐닝 미러 ; scanning mirror for optical pick-up head ; UV-LIGA 공정 ; UV-LIGA process ; squeeze effect ; the driving electrode with grooves
- Description
- 학위논문(석사)--서울대학교 대학원 :전기.컴퓨터공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000065142
https://hdl.handle.net/10371/37324
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.