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나노임프린트 리소그래피 충전 공정의 가압력 해석과 버블 결함 생성 조건
Analysis of the mold pressure and the conditions of bubble defect formation in the filling process of nanoimprint lithography

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Authors
이영훈
Advisor
신효철
Issue Date
2009
Publisher
서울대학교 대학원
Keywords
나노임프린트 리소그래피Nanoimprint lithography벽면 미끄러짐Wall slip접촉각Contact angle버블Bubble몰드Mold
Description
학위논문(박사)--서울대학교 대학원 :기계항공공학부,2009.8.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038148
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Mechanical Aerospace Engineering (기계항공공학부)Theses (Ph.D. / Sc.D._기계항공공학부)
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