Publications

Detailed Information

Epi poly를 이용한 MEMS 소자용 웨이퍼 단위의 진공 패키징에 대한 연구

Cited 0 time in Web of Science Cited 0 time in Scopus
Authors

오창훈

Advisor
전국진
Issue Date
2000
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :전기공학부,2000.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000068294

https://hdl.handle.net/10371/42603
Files in This Item:
There are no files associated with this item.
Appears in Collections:

Altmetrics

Item View & Download Count

  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.

Share