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Fabrication of metal pattern using unconventional lithography and Cu electroplating method : 비전통 리소그래피법과 구리 도금법을 이용한 금속 패턴의 제작
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- Authors
- Advisor
- 이홍희
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 전기 도금법 ; Rapid flash patterning(RFP) ; 구리 ; electroplating ; 광학기기 ; copper ; 소프트리소그래피법 ; optical device
- Description
- Thesis(master`s)--서울대학교 대학원 :협동과정 나노과학기술전공,2007.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045636
https://hdl.handle.net/10371/43542
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