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알루미늄 마이크로 다리의 stress 측정 : Stress measurement of Al microbridges
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 차국린 | - |
| dc.contributor.author | 박일석 | - |
| dc.date.accessioned | 2010-01-25T07:25:03Z | - |
| dc.date.available | 2010-01-25T07:25:03Z | - |
| dc.date.copyright | 2005. | - |
| dc.date.issued | 2005 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050836 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/43557 | - |
| dc.description | 학위논문(석사)--서울대학교 대학원 :협동과정 나노과학기술전공,2005. | ko |
| dc.format.extent | 26 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 알루미늄 | ko |
| dc.subject | Aluminum | ko |
| dc.subject | 고유진동수 | ko |
| dc.subject | resonance frequency | ko |
| dc.subject | intrinsic stress | ko |
| dc.subject | intrinsic stress | ko |
| dc.subject | MEMS | ko |
| dc.subject | MEMS | ko |
| dc.title | 알루미늄 마이크로 다리의 stress 측정 | ko |
| dc.title.alternative | Stress measurement of Al microbridges | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 협동과정 나노과학기술전공 | - |
| dc.description.degree | Master | ko |
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