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(A)Study on the design and performance characteristics of micropump using piezoelectric actuator

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Authors

최종원

Advisor
김민수
Issue Date
2006
Publisher
서울대학교 대학원
Keywords
마이크로펌프MEMS양방향valveless압전소자bidirectional경사채널micropump마이크로밸브PZT membraneoblique channel
Description
Thesis(master`s)--서울대학교 대학원 :기계항공공학부,2006.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047597

https://hdl.handle.net/10371/43741
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