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MEMS 열 액츄에이터의 최적설계 및 실험적 검증 : Design optimization and experimental verification for micro thermal actuators
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김윤영 | - |
| dc.contributor.author | 허석 | - |
| dc.date.accessioned | 2010-01-26 | - |
| dc.date.available | 2010-01-26 | - |
| dc.date.copyright | 2006. | - |
| dc.date.issued | 2006 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048724 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/44278 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2006. | ko |
| dc.format.extent | ix, 109 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 초소형 열 액츄에이터 | ko |
| dc.subject | Micro thermal actuators | ko |
| dc.subject | 회전형 열 액츄에이터 | ko |
| dc.subject | Rotary thermal actuator | ko |
| dc.subject | 다물리 시스템 | ko |
| dc.subject | Multi-physics system | ko |
| dc.subject | 위상최적설계 | ko |
| dc.subject | Topology optimization | ko |
| dc.subject | 요소 연결 매개법 | ko |
| dc.subject | Element Connectivity Parameterization(ECP) method | ko |
| dc.subject | 최소 선폭 조절기법 | ko |
| dc.subject | Minimum Thickness Control(MTC) method | ko |
| dc.subject | 강건최적설계 | ko |
| dc.subject | Robustness | ko |
| dc.subject | MEMS | ko |
| dc.subject | MEMS | ko |
| dc.title | MEMS 열 액츄에이터의 최적설계 및 실험적 검증 | ko |
| dc.title.alternative | Design optimization and experimental verification for micro thermal actuators | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 기계항공공학부 | - |
| dc.description.degree | Doctor | ko |
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