Publications
Detailed Information
서브픽셀 정밀도의 경계추출 이용한 TFT-LCD 형상 측정 시스템 개발 : Development of critical dimension measurement system of TFT-LCD patterns using subpixel edge detection
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 박희재
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- LCD ; CD(Critical Dimension) ; Auto-Focusing ; Pattern Matching ; Subpixel Edge Detection
- Description
- 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050066
https://hdl.handle.net/10371/44581
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.