Publications
Detailed Information
Tomographic imaging을 이용한 in-lined LCD 형상 검사 시스템 개발 : Development of in-lined LCD pattern inspection system using tomographic imagin
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 박희재
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- 형상 검사 ; Pattern Inspection ; 토모그래픽 ; Tomographic Imaging ; 간섭계 ; Coherence Scanning Optic ; 이미지 프로세싱 ; White Light ; 백색광 ; Image Processing
- Description
- 학위논문(박사)--서울대학교 대학원 :기계항공공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056531
https://hdl.handle.net/10371/44583
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.