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초정밀 위치결정용 마이크로 병렬기구 플랫폼의 설계와 해석 : Design and analysis of a micro parallel mechanism platform for ultra-precision positioning

DC Field Value Language
dc.contributor.advisor김종원-
dc.contributor.author오군규-
dc.date.accessioned2010-01-26T05:41:35Z-
dc.date.available2010-01-26T05:41:35Z-
dc.date.copyright2004.-
dc.date.issued2004-
dc.identifier.urihttp://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054688kog
dc.identifier.urihttps://hdl.handle.net/10371/44596-
dc.description학위논문(박사)--서울대학교 대학원 :기계항공공학부,2004.ko
dc.format.extentvii, 158 p.ko
dc.language.isokoko
dc.publisher서울대학교 대학원ko
dc.subject마이크로 병렬기구ko
dc.subjectMicro parallel mechanismko
dc.subject초정밀 위치결정ko
dc.subjectUltra-positioningko
dc.subject이중 스테이지 시스템ko
dc.subjectDual stage systemko
dc.subject기구학 해석ko
dc.subjectKinematic analysisko
dc.subject오차해석ko
dc.subjectError analysisko
dc.subjectOptimal designko
dc.title초정밀 위치결정용 마이크로 병렬기구 플랫폼의 설계와 해석ko
dc.title.alternativeDesign and analysis of a micro parallel mechanism platform for ultra-precision positioningko
dc.typeThesis-
dc.contributor.department기계항공공학부-
dc.description.degreeDoctorko
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