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AlGaNGaN HEMT에 주입된 Fluoride 이온의 유사 필드 플레이트효과
Psuedo field plate effect of the fluoride ion complex implanted in AlGaNGan HEMT

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Authors
김영실
Advisor
한민구
Issue Date
2009
Publisher
서울대학교 대학원
Keywords
AlGaNGaNGaN 고이동도소자AlGaN불소이온HEMT플라즈마 표면처리FluoridePlasmaSurface treatment
Description
학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2009.8.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038748

http://hdl.handle.net/10371/44672
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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