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감도 향상을 위한 실리콘 나노 와이어를 이용한 압저항 압력 센서에 관한 연구 : (A) Study for enhancing sensitivity of piezoresistive pressure sensor using silicon nanowire
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 전국진 | - |
| dc.contributor.author | 김종혁 | - |
| dc.date.accessioned | 2010-01-26T06:12:43Z | - |
| dc.date.available | 2010-01-26T06:12:43Z | - |
| dc.date.copyright | 2009. | - |
| dc.date.issued | 2009 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000038729 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/44690 | - |
| dc.description | 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2009.8. | ko |
| dc.format.extent | v, 51장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | 압저항 압력 센서 | ko |
| dc.subject | piezoresistive pressure sensor | ko |
| dc.subject | 나노와이어 | ko |
| dc.subject | nanowire | ko |
| dc.subject | 감도 | ko |
| dc.subject | sensitivity | ko |
| dc.subject | 측정범위 | ko |
| dc.subject | dynamic range | ko |
| dc.subject | 습식 식각 | ko |
| dc.subject | wet etch | ko |
| dc.subject | 다이아프래임 | ko |
| dc.subject | diaphragm | ko |
| dc.subject | low cost | ko |
| dc.title | 감도 향상을 위한 실리콘 나노 와이어를 이용한 압저항 압력 센서에 관한 연구 | ko |
| dc.title.alternative | (A) Study for enhancing sensitivity of piezoresistive pressure sensor using silicon nanowire | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기. 컴퓨터공학부 | - |
| dc.description.degree | Master | ko |
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