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(A) Study on Nano Beam Fabrication for RF Filter Applications : RF 여파기용 나노 빔 제작에 대한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김용권 | - |
| dc.contributor.author | 이용석 | - |
| dc.date.accessioned | 2010-01-26T06:14:52Z | - |
| dc.date.available | 2010-01-26T06:14:52Z | - |
| dc.date.copyright | 2009. | - |
| dc.date.issued | 2009 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000037066 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/44736 | - |
| dc.description | Thesis(masters) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2. | en |
| dc.format.extent | iv, 72 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 나노 빔 공진기 | en |
| dc.subject | vertical nano beam resonator | en |
| dc.subject | RF MEMS 여파기 | en |
| dc.subject | high frequency | en |
| dc.subject | 자가 정렬 마스크 | en |
| dc.subject | RF MEMS filter | en |
| dc.subject | 뒷면 노광 | en |
| dc.subject | self-aligned mask | en |
| dc.subject | modified CPW line | en |
| dc.title | (A) Study on Nano Beam Fabrication for RF Filter Applications | en |
| dc.title.alternative | RF 여파기용 나노 빔 제작에 대한 연구 | en |
| dc.type | Thesis | - |
| dc.contributor.department | 전기. 컴퓨터공학부 | - |
| dc.description.degree | Master | en |
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