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다구치 방법을 이용한 비정질 수정 건식 식각 공정 조건 최적화와 비정질 수정 외팔보의 Q-factor 분석 : Optimization for fused quartz DRIE process using taguchi method and Q factor analysis for fused quartz micro cantilever
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- Authors
- Advisor
- 김용권
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000037040
https://hdl.handle.net/10371/44762
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