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Development of production technology for metal-based high aspect ratio 3D micro parts

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Authors

윤찬

Advisor
김종원
Issue Date
2004
Publisher
서울대학교 대학원
Keywords
SU-8SU-8고종횡비High aspect ratio3차원 형상 가공3D shapeMEMS-RPMEMS-RP
Description
Thesis(master`s)--서울대학교 대학원 :기계항공공학부,2004.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055866

https://hdl.handle.net/10371/44805
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