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Development of an efficient radiative transfer model for specular surfaces and its application to optimization of rapid thermal processing : 정반사면에서의 복사전달 해석 모델개발과 급속 열공정 최적화에의 응용
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이준식 | - |
| dc.contributor.author | 강새별 | - |
| dc.date.accessioned | 2010-01-26T07:14:07Z | - |
| dc.date.available | 2010-01-26T07:14:07Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000058587 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/44868 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :기계공학과,2003. | en |
| dc.format.extent | xviii, 173 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 급속열공정 | en |
| dc.subject | Rapid thermal processing (rtp) | en |
| dc.subject | 웨이퍼 | en |
| dc.subject | Wafer | en |
| dc.subject | 복사열전달 | en |
| dc.subject | Radiative heat transfer | en |
| dc.subject | 확산면 | en |
| dc.subject | Diffuse | en |
| dc.subject | 정반사면 | en |
| dc.subject | Specular | en |
| dc.subject | 경유반사법 | en |
| dc.subject | Transition reflection method | en |
| dc.subject | 최적화 | en |
| dc.subject | Optimization | en |
| dc.subject | 선형계수법 | en |
| dc.subject | Uniformity | en |
| dc.subject | Linear programming | en |
| dc.title | Development of an efficient radiative transfer model for specular surfaces and its application to optimization of rapid thermal processing | en |
| dc.title.alternative | 정반사면에서의 복사전달 해석 모델개발과 급속 열공정 최적화에의 응용 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 기계공학과 | - |
| dc.description.degree | Doctor | en |
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