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자가참조에 기반한 복수패턴 wafer의 불량 검출
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- Authors
- Advisor
- 유석인
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- 불량 검출 ; Defect detection ; 반도체 ; Semiconductor ; Wafer ; Wafer ; Non-referential ; Non-referential ; Gaussian Mixture Model ; Gaussian Mixture Model ; Thresholding ; Thresholding
- Description
- 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000037007
https://hdl.handle.net/10371/44880
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