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Folded split gate SONOS memory의 제작 및 특성 분석 : Fabrication and characteristics of folded split gate SONOS memory

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Authors

박세환

Advisor
박병국
Issue Date
2009
Publisher
서울대학교 대학원
Keywords
split gatesplit gaterecessed channelrecessed channelSONOS memorySONOS memory공정 방법fabrication process
Description
학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부, 2009.2.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000036988

https://hdl.handle.net/10371/44897
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