Publications
Detailed Information
Design and fabrication of a 2-DOF micromirrorarray with hidden vertical combdrive actuator
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- Authors
- Advisor
- 김용권
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 극한 대기 방전 현상 ; Transient luminous events ; 수직 콤 구동기 ; vertical comb drive ; 마이크로미러 어레이 ; micromirror array ; high fill-factor ; high-fill factor ; 실리콘 몸통 가공 공정 ; bulk-micromachining
- Description
- Thesis(masters) --서울대학교 대학원 :전기. 컴퓨터공학부,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000042219
https://hdl.handle.net/10371/45069
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