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Improved imprint lithography for nanofabrication
나노 구조물 제조를 위한 임프린트 리소그래피 공정의 개선

DC Field Value Language
dc.contributor.advisor이홍희-
dc.contributor.author홍필순-
dc.date.accessioned2010-01-27-
dc.date.available2010-01-27-
dc.date.copyright2006.-
dc.date.issued2006-
dc.identifier.urihttps://hdl.handle.net/10371/45320-
dc.descriptionThesis(doctor`s)--서울대학교 대학원 :응용화학부,2006.en
dc.format.extentxiii, 98 leavesen
dc.language.isoenen
dc.publisher서울대학교 대학원en
dc.subject균일성en
dc.subjectUniformityen
dc.subject변형 경화en
dc.subjectStrain-hardeningen
dc.subject탄성 복원en
dc.subjectElastic recoveryen
dc.subject패턴 결함en
dc.subjectPattern failureen
dc.subject파단en
dc.subjectFractureen
dc.subject신장en
dc.subjectElongationen
dc.subject소성 영역en
dc.subjectYielded zoneen
dc.subject100 나노미터 이하 패턴en
dc.subjectSub-100 nm patternen
dc.subject콘트라스트-변형 임프린트 리소그래피en
dc.subjectContrast-modified room-temperature imprint lithographyen
dc.subject감광제en
dc.subjectPhotoresisten
dc.subject전반사en
dc.subjectTotal internal reflectionen
dc.subject빛 강도 차이en
dc.subjectIntensity contrasten
dc.titleImproved imprint lithography for nanofabricationen
dc.title.alternative나노 구조물 제조를 위한 임프린트 리소그래피 공정의 개선en
dc.typeThesis-
dc.contributor.department응용화학부-
dc.description.degreeDoctoren
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College of Agriculture and Life Sciences (농업생명과학대학)Dept. of Applied Biology and Chemistry (응용생물화학부)Theses (Ph.D. / Sc.D._응용생물화학부)
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