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Design and analysis of out-of-plane and in-plane differential resonant silicon accelerometers for navigational applications : 항법급 수직형, 수평형 차동공진형가속도계의 설계 및 해석
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 전국진 | - |
| dc.contributor.author | 석선호 | - |
| dc.date.accessioned | 2010-01-27 | - |
| dc.date.available | 2010-01-27 | - |
| dc.date.copyright | 2004. | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056187 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/45458 | - |
| dc.description | Thesis(doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004. | en |
| dc.format.extent | xiii, 126 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 멤스 | en |
| dc.subject | MEMS | en |
| dc.subject | 가속도계 | en |
| dc.subject | accelerometer | en |
| dc.subject | 공진형 | en |
| dc.subject | resonant | en |
| dc.subject | 항법급 | en |
| dc.subject | inertial-grade | en |
| dc.subject | 차동형 | en |
| dc.subject | differential | en |
| dc.subject | 수직형 | en |
| dc.subject | out-of-plane | en |
| dc.subject | 수평형 | en |
| dc.subject | in-plane | en |
| dc.subject | 진공실장 | en |
| dc.subject | vacuum packaging | en |
| dc.subject | 웨이퍼 단위 | en |
| dc.subject | wafer-level | en |
| dc.subject | 선택도 | en |
| dc.subject | quality factor | en |
| dc.subject | 마이크로머시닝 | en |
| dc.subject | micromachining | en |
| dc.title | Design and analysis of out-of-plane and in-plane differential resonant silicon accelerometers for navigational applications | en |
| dc.title.alternative | 항법급 수직형, 수평형 차동공진형가속도계의 설계 및 해석 | en |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | en |
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