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Isolation method for single crystal silicon MEMS with selective silicon-on-insulator structure : 선택적인 SOI 구조를 이용한 단결정실리콘 MEMS의 절연 방법
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 조동일 | - |
| dc.contributor.author | 박상준 | - |
| dc.date.accessioned | 2010-01-27 | - |
| dc.date.available | 2010-01-27 | - |
| dc.date.copyright | 2004. | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000055547 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/45473 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2004. | en |
| dc.format.extent | xiv, 79 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | selective SOI | en |
| dc.subject | 선택적 SOI | en |
| dc.subject | Footing Phenomenon in SOI | en |
| dc.subject | 푸팅 현상 | en |
| dc.subject | Residual Stress | en |
| dc.subject | 잔류 응력 | en |
| dc.subject | Gyroscope | en |
| dc.subject | 자이로스코프 | en |
| dc.title | Isolation method for single crystal silicon MEMS with selective silicon-on-insulator structure | en |
| dc.title.alternative | 선택적인 SOI 구조를 이용한 단결정실리콘 MEMS의 절연 방법 | en |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | en |
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