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High Stem T-gate을 가지는 0.1um GaAs pHEMT 공정개발 및 제작에 관한 연구
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- Authors
- Advisor
- 서광석
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- High Stem T-gate ; High stem t-gate ; PMGI ; Pmgi ; E-Beam lithography ; E-beam lithography ; GaAs pHEMT ; Gaas phemt
- Description
- 학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000054001
https://hdl.handle.net/10371/45631
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