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탄성힌지와 압전소자를 이용한 AFM scanner용 초정밀 XYZ 스테이지 개발
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- Authors
- Advisor
- 박희재
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- AFM Scanner ; Afm scanner ; 탄성힌지 ; Pzt actuator ; 압전소자구동기 ; Elastic hinge ; 초정밀 위치제어 ; Position control ; 3-DOF Stage ; Coupled motion ; 간섭운동 ; 3-dof stage ; 마이크로 스테이지 ; Micro stage
- Description
- 학위논문(석사)--서울대학교 대학원 :기계항공공학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000059855
https://hdl.handle.net/10371/45653
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