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超高眞空 電子回轉共鳴 플라즈마 化學氣狀蒸着 裝置 製作 및 실리콘 기판 洗淨과 炭化에의 응용 : Fabrication of ultra high vacuum electron cycloton resonance plasma chemical vapor deposition system and its application to the cleaning and carbonization of Si wafer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 황기웅 | - |
| dc.contributor.author | 표재확 | - |
| dc.date.accessioned | 2010-01-27T23:14:41Z | - |
| dc.date.available | 2010-01-27T23:14:41Z | - |
| dc.date.copyright | 2003. | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.snu.ac.kr/search/DetailView.ax?sid=1&cid=0001113355 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/45856 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :전기·컴퓨터공학부,2003. | ko |
| dc.format.extent | xii, 136 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.title | 超高眞空 電子回轉共鳴 플라즈마 化學氣狀蒸着 裝置 製作 및 실리콘 기판 洗淨과 炭化에의 응용 | ko |
| dc.title.alternative | Fabrication of ultra high vacuum electron cycloton resonance plasma chemical vapor deposition system and its application to the cleaning and carbonization of Si wafer | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | ko |
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