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고정밀 단결정 실리콘 초소형 자이로스코프의 설계, 제작 및 평가에 관한 연구 : Design, fabrication and measurement of a single crystalline silicon high precision microgyroscope
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- Authors
- Advisor
- 김용권
- Issue Date
- 2006
- Publisher
- 서울大學校 大學院
- Keywords
- 자이로스코프 ; gyroscope ; MEMS ; MEMS ; 항법급 ; navigational grade ; 평면 진동형 ; in-plane vibratory ; 정전 용량 감지 ; capacitive detection ; SiOG ; SiOG ; 웨이퍼 수준 진공 실장 ; wafer level vacuum package ; 감도 ; sensitivity ; 잡음 ; noise ; 분해능 ; resolution
- Description
- 학위논문(박사)--서울大學校 大學院 :전기·컴퓨터 공학부,2006.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000046567
https://hdl.handle.net/10371/45918
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